Inventor · Suwon-si, KR

Wonwoong Chung

5Patents
2h-index
27Co-inventors
43Inventor score

Filing activity: Aug 31, 2015 → Mar 23, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US10134583B2 Methods of forming a low-k dielectric layer and methods of fabricating a semiconductor device using the same Electricity 3 Active
US9460935B2 Method for fabricating semiconductor devices Electricity 3 Active
US12287064B2 Gas container and deposition system including the same Mechanical Engineering; Lighting; Heating 0 Active
US12183591B2 Etching gas compositions, methods of forming micropatterns, and methods of manufacturing semiconductor device Electricity 0 Active
US10883173B2 Gas storage cylinder, deposition system, and method of manufacturing semiconductor device Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.