Wonwoong Chung
5Patents
2h-index
27Co-inventors
43Inventor score
Filing activity: Aug 31, 2015 → Mar 23, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10134583B2 | Methods of forming a low-k dielectric layer and methods of fabricating a semiconductor device using the same | Electricity | 3 | Active |
| US9460935B2 | Method for fabricating semiconductor devices | Electricity | 3 | Active |
| US12287064B2 | Gas container and deposition system including the same | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US12183591B2 | Etching gas compositions, methods of forming micropatterns, and methods of manufacturing semiconductor device | Electricity | 0 | Active |
| US10883173B2 | Gas storage cylinder, deposition system, and method of manufacturing semiconductor device | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.