Yi Zhou
6Patents
1h-index
13Co-inventors
48Inventor score
Filing activity: Mar 31, 1999 → Nov 3, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6120350A | Process for reconditioning polishing pads | Performing Operations; Transporting | 8 | Expired |
| US10217627B2 | Methods of non-destructive post tungsten etch residue removal | Performing Operations; Transporting | 1 | Active |
| US9885567B2 | Substrate placement detection in semiconductor equipment using thermal response characteristics | Electricity | 0 | Active |
| US11521838B2 | Integrated cleaning process for substrate etching | Electricity | 0 | Active |
| US12255055B2 | Integrated cleaning process for substrate etching | Electricity | 0 | Active |
| US11702738B2 | Chamber processes for reducing backside particles | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.