Inventor · Shanghai, CN

Yunwen Huang

10Patents
2h-index
18Co-inventors
47Inventor score

Filing activity: Nov 2, 2007 → Dec 16, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US8518224B2 Plating apparatus for metallization on semiconductor workpiece Chemistry; Metallurgy 3 Active
US8580042B2 Methods and apparatus for cleaning semiconductor wafers Electricity 2 Active
US9492852B2 Methods and apparatus for cleaning semiconductor wafers Electricity 1 Active
US8671961B2 Methods and apparatus for cleaning semiconductor wafers Electricity 1 Active
US9595457B2 Methods and apparatus for cleaning semiconductor wafers Electricity 1 Active
US11670515B2 Capacitively coupled plasma etching apparatus Emerging Cross-Sectional Technologies 0 Active
US10020208B2 Methods and apparatus for cleaning semiconductor wafers Electricity 0 Active
US11515168B2 Capacitively coupled plasma etching apparatus Electricity 0 Active
US9633833B2 Methods and apparatus for cleaning semiconductor wafers Electricity 0 Active
US11373843B2 Capacitively coupled plasma etching apparatus Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.