Yuuji Kamikawa
12Patents
11h-index
23Co-inventors
64Inventor score
Filing activity: Aug 26, 1992 → Jan 27, 1997
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5301700A | Washing system | Emerging Cross-Sectional Technologies | 84 | Expired |
| US5369891A | Substrate drying apparatus | Mechanical Engineering; Lighting; Heating | 57 | Expired |
| US5370142A | Substrate washing device | Emerging Cross-Sectional Technologies | 56 | Expired |
| US5443540A | Apparatus and method for drying substrates | Electricity | 48 | Expired |
| US5845660A | Substrate washing and drying apparatus, substrate washing method, and substrate washing apparatus | Emerging Cross-Sectional Technologies | 48 | Expired |
| US5445699A | Processing apparatus with a gas distributor having back and forth parallel movement relative to a workpiece support surface | Chemistry; Metallurgy | 48 | Expired |
| US6001191A | Substrate washing method, substrate washing-drying method, substrate washing apparatus and substrate washing-drying apparatus | Emerging Cross-Sectional Technologies | 41 | Expired |
| US5253663A | Transfer apparatus | Emerging Cross-Sectional Technologies | 17 | Expired |
| US5671764A | Washing apparatus, and washing method | Emerging Cross-Sectional Technologies | 15 | Expired |
| US5782990A | Method for washing objects | Emerging Cross-Sectional Technologies | 12 | Expired |
| US5431179A | Wafer drying apparatus and fire-extinguishing method therefor | Emerging Cross-Sectional Technologies | 12 | Expired |
| US5887604A | Washing apparatus, and washing method | Emerging Cross-Sectional Technologies | 11 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.