Multi-zone gas injection assembly with azimuthal and radial distribution control
US10008368B2 · kind B2 · utility
5Cited by
59References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 3, 2014 |
| Grant date | Jun 26, 2018 |
| Priority date | — |
| Expiry date | Mar 18, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/34
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A gas injection system includes (a) a side gas plenum, (b) a plurality of N gas inlets coupled to said side gas plenum, (c) plural side gas outlets extending radially inwardly from said plenum, (d) an N-way gas flow ratio controller having N outputs coupled to said N gas inlets respectively, and (e) an M-way gas flow ratio controller having M outputs, respective ones of said M outputs coupled to said tunable gas nozzle and a gas input of said N-way gas flow ratio controller.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.