Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles
US10493691B2 · kind B2 · utility
15Cited by
35References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 2, 2017 |
| Grant date | Dec 3, 2019 |
| Priority date | — |
| Expiry date | Oct 23, 2037 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29L2031/736
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A polishing article manufacturing system includes a feed section and a take-up section, the take-up section comprising a supply roll having a polishing article disposed thereon for a chemical mechanical polishing process, a print section comprising a plurality of printheads disposed between the feed section and the take-up section, and a curing section disposed between the feed section and the take-up section, the curing section comprising one or both of a thermal curing device and an electromagnetic curing device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.