Patent · US Active

Three-dimensional memory devices

US10867678B2 · kind B2 · utility

5Cited by
2References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 21, 2018
Grant dateDec 15, 2020
Priority date
Expiry dateOct 17, 2038

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10N70/011
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Embodiments of three-dimensional (3D) memory devices are disclosed. In an example, a 3D memory device includes a substrate, a peripheral device disposed on the substrate, a memory stack disposed above the peripheral device and including a plurality of conductor/dielectric layer pairs, and a plurality of memory strings. Each of the memory strings extends vertically through the memory stack and includes a drain select gate and a source select gate above the drain select gate. Edges of the conductor/dielectric layer pairs in a staircase structure of the memory stack along a vertical direction away from the substrate are staggered laterally toward the memory strings.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.