Chemical delivery chamber for self-assembled monolayer processes

US11066747B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Qiwei Liang · Fremont, US
• Adib Khan · Santa Clara, US
• Tobin Kaufman-Osborn · Sunnyvale, US
• Srinivas D. Nemani · Sunnyvale, US
• Ludovic Godet · Sunnyvale, US

Key dates

• Filing date: Mar 24, 2017
• Grant date: Jul 20, 2021
• Expiry date: Aug 9, 2037

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B05D1/60
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Implementations described herein relate to apparatus and methods for self-assembled monolayer (SAM) deposition. Apparatus described herein includes processing chambers having various vapor phase delivery apparatus fluidly coupled thereto. SAM precursors may be delivered to process volumes of the chambers via various apparatus which is heated to maintain the precursors in vapor phase. In one implementation, a first ampoule or vaporizer configured to deliver a SAM precursor may be fluidly coupled to the process volume of a process chamber. A second ampoule or vaporizer configured to deliver a material different from the SAM precursor may also be fluidly coupled to the process volume of the process chamber.