Inventor · Santa Clara, CA, US

Adib Khan

27Patents
8h-index
25Co-inventors
71Inventor score

Filing activity: Jul 15, 2010 → Nov 29, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US8894767B2 Flow control features of CVD chambers Emerging Cross-Sectional Technologies 105 Active
US10179941B1 Gas delivery system for high pressure processing chamber Electricity 27 Active
US10675581B2 Gas abatement apparatus Performing Operations; Transporting 18 Active
US10720341B2 Gas delivery system for high pressure processing chamber Electricity 18 Active
US10529603B2 High pressure wafer processing systems and related methods Electricity 17 Active
US10224224B2 High pressure wafer processing systems and related methods Electricity 17 Active
US10748783B2 Gas delivery module Electricity 16 Active
US10358715B2 Integrated cluster tool for selective area deposition Electricity 11 Active
US10704141B2 In-situ CVD and ALD coating of chamber to control metal contamination Electricity 6 Active
US9285168B2 Module for ozone cure and post-cure moisture treatment Electricity 2 Active
US10113236B2 Batch curing chamber with gas distribution and individual pumping Electricity 2 Active
US10550472B2 Flow control features of CVD chambers Emerging Cross-Sectional Technologies 2 Active
US10947621B2 Low vapor pressure chemical delivery Chemistry; Metallurgy 1 Active
US11066747B2 Chemical delivery chamber for self-assembled monolayer processes Performing Operations; Transporting 1 Active
US11110383B2 Gas abatement apparatus Performing Operations; Transporting 0 Active
US12203171B2 Batch curing chamber with gas distribution and individual pumping Electricity 0 Active
US11725274B2 Integrated cluster tool for selective area deposition Electricity 0 Active
US11361978B2 Gas delivery module Electricity 0 Active
US12146219B2 Flow control features of CVD chambers Emerging Cross-Sectional Technologies 0 Active
US12198951B2 High pressure wafer processing systems and related methods Electricity 0 Active
US8524004B2 Loadlock batch ozone cure Electricity 0 Active
US11408075B2 Batch curing chamber with gas distribution and individual pumping Electricity 0 Active
USD941787S1 Substrate transfer blade General 0 Active
US11749555B2 Semiconductor processing system Electricity 0 Active
US11948828B2 Pin-less substrate transfer apparatus and method for a processing chamber Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.