Blocker plate for use in a substrate process chamber
US11421322B2 · kind B2 · utility
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1References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 24, 2019 |
| Grant date | Aug 23, 2022 |
| Priority date | — |
| Expiry date | Jun 18, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67017
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Embodiments of a blocker plate for use in a substrate process chamber are disclosed herein. In some embodiments, a blocker plate for use in a substrate processing chamber configured to process substrates having a given diameter includes: an annular rim; a central plate disposed within the annular rim; and a plurality of spokes coupling the central plate to the annular rim.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.