Inventor · Belmont, CA, US

Yu Lei

71Patents
7h-index
204Co-inventors
71Inventor score

Filing activity: Oct 13, 2008 → Mar 8, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US9330939B2 Method of enabling seamless cobalt gap-fill Electricity 43 Active
US9685371B2 Method of enabling seamless cobalt gap-fill Electricity 28 Active
US9082702B2 Atomic layer deposition methods for metal gate electrodes Electricity 15 Active
US9005816B2 Coating of porous carbon for use in lithium air batteries Emerging Cross-Sectional Technologies 14 Active
US8637390B2 Metal gate structures and methods for forming thereof Electricity 12 Active
US9048183B2 NMOS metal gate materials, manufacturing methods, and equipment using CVD and ALD processes with metal based precursors Electricity 11 Active
US8524600B2 Post deposition treatments for CVD cobalt films Electricity 10 Active
US8642468B2 NMOS metal gate materials, manufacturing methods, and equipment using CVD and ALD processes with metal based precursors Electricity 6 Active
US9230835B2 Integrated platform for fabricating n-type metal oxide semiconductor (NMOS) devices Electricity 5 Active
US8765601B2 Post deposition treatments for CVD cobalt films Electricity 5 Active
US10256144B2 Process integration approach of selective tungsten via fill Electricity 4 Active
US8765483B2 Explosives detection substrate and methods of using the same Emerging Cross-Sectional Technologies 2 Active
US9514933B2 Film deposition using spatial atomic layer deposition or pulsed chemical vapor deposition Electricity 2 Active
US9881787B2 Deposition methods for uniform and conformal hybrid titanium oxide films Electricity 2 Active
US8586479B2 Methods for forming a contact metal layer in semiconductor devices Electricity 2 Active
US9145612B2 Deposition of N-metal films comprising aluminum alloys Chemistry; Metallurgy 2 Active
US9842769B2 Method of enabling seamless cobalt gap-fill Electricity 2 Active
US8987080B2 Methods for manufacturing metal gates Electricity 2 Active
US11404313B2 Selective tungsten deposition at low temperatures Electricity 1 Active
US11749543B2 Chamber matching and calibration Emerging Cross-Sectional Technologies 1 Active
US10727119B2 Process integration approach of selective tungsten via fill Electricity 1 Active
US9329148B2 High temperature sensor selective for propane and other reducing gases Emerging Cross-Sectional Technologies 1 Active
US9947578B2 Methods for forming low-resistance contacts through integrated process flow systems Electricity 1 Active
US11387134B2 Process kit for a substrate support Electricity 1 Active
US10442982B2 Multifunctional particles for enhanced oil recovery Chemistry; Metallurgy 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.