Gas hub for plasma reactor
US11728141B2 · kind B2 · utility
1Cited by
42References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 1, 2022 |
| Grant date | Aug 15, 2023 |
| Priority date | — |
| Expiry date | Feb 1, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32082
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A gas distribution hub for a plasma chamber. The hub has a nozzle including a plurality of inner gas injection passage and a plurality of outer gas injection passages. The first plurality of gas injection passages are angularly spaced-apart arcuate channels at a first radial distance from a center of the hub, and the second plurality of gas injection passages are angularly spaced apart arcuate channels at a different second radial distance from the center of the hub.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.