Substrate processing system
US5826129A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Jun 29, 1995 |
| Grant date | Oct 20, 1998 |
| Priority date | — |
| Expiry date | Jun 29, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67184
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
This invention provides a substrate processing system including a cassette station on which at least one cassette containing a plurality of objects is placed, a process station including a plurality of process chambers for performing processing for the objects, and an object conveying unit for loading the objects into the process chambers and unloading the objects from the process chambers, a first object transfer unit for transferring the objects between the cassette station and the process station, and an interface section including an object waiting region where the objects wait, and a second object transfer unit for transferring the objects to the process station, wherein the process chambers in the process station are arranged around the object conveying unit, and the object conveying unit has a rotating shaft almost parallel to the vertical direction and can move up and down in the vertical direction along the rotating shaft and rotate about the rotating shaft.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.