Keizo Hasebe
11Patents
11h-index
22Co-inventors
68Inventor score
Filing activity: Sep 12, 1991 → Mar 26, 2001
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5826129A | Substrate processing system | Electricity | 472 | Expired |
| US5658615A | Method of forming coating film and apparatus therefor | Electricity | 126 | Expired |
| US5374312A | Liquid coating system | Emerging Cross-Sectional Technologies | 74 | Expired |
| US5942035A | Solvent and resist spin coating apparatus | Electricity | 71 | Expired |
| US5252137A | System and method for applying a liquid | Electricity | 59 | Expired |
| US6033475A | Resist processing apparatus | Physics | 59 | Expired |
| US6063190A | Method of forming coating film and apparatus therefor | Electricity | 53 | Expired |
| US6228561A | Film forming method and film forming apparatus | Performing Operations; Transporting | 24 | Expired |
| US6217657A | Resist processing system having process solution deaeration mechanism | Physics | 21 | Expired |
| US5866307A | Resist processing method and resist processing system | Physics | 17 | Expired |
| US6503003B2 | Film forming method and film forming apparatus | Performing Operations; Transporting | 15 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.