Extraction method of defect density and size distributions
US7024642B2 · kind B2 · utility
10Cited by
2References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 12, 2002 |
| Grant date | Apr 4, 2006 |
| Priority date | — |
| Expiry date | Nov 25, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A characterization vehicle includes a substrate having at least one layer (300), and a plurality of pairs of nested serpentine lines on a single surface of a single layer of the substrate (301a . . . 301h, 302a . . . 302h), each pair of nested serpentine lines having a shared pad between them (312a . . . 312h).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.