Method and apparatus for megasonic cleaning with reflected acoustic waves
US7040332B2 · kind B2 · utility
5Cited by
9References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2003 |
| Grant date | May 9, 2006 |
| Priority date | — |
| Expiry date | May 15, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A system for cleaning a substrate includes a tank defining an inner cavity between a base and sidewalls extending therefrom. A source of acoustic energy affixed to an outer surface of one of the sidewalls. The tank is configured to decouple a direction associated with the acoustic energy from the source of acoustic energy and direct the acoustic energy toward the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.