In-line electron beam test system

US7535238B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Fayez E. Abboud · Pleasanton, US
• Sriram Krishnaswami · Saratoga, US
• Benjamin M. Johnston · Los Gatos, US
• Hung T. Nguyen · Fremont, US
• Matthias Brunner · Tauberbischofsheim, DE
• Ralf Schmid · Karlsruhe, DE
• John M. White · Hayward, US
• Shinichi Kurita · San Jose, US
• James Craig Hunter · Los Gatos, US

Key dates

• Filing date: Mar 14, 2006
• Grant date: May 19, 2009
• Expiry date: Mar 14, 2026

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/2817
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.