Method and apparatus for transporting a substrate using non-newtonian fluid
US7591613B2 · kind B2 · utility
2Cited by
9References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 15, 2008 |
| Grant date | Sep 22, 2009 |
| Priority date | — |
| Expiry date | Jul 15, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67057
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method for transporting a substrate is provided. In this method, a non-Newtonian fluid is provided and the substrate is suspended in the non-Newtonian fluid. The non-Newtonian fluid is capable of supporting the substrate. Thereafter, a supply force is applied on the non-Newtonian fluid to cause the non-Newtonian fluid to flow, whereby the flow is capable of moving the substrate along a direction of the flow. Apparatuses and systems for transporting the substrate using the non-Newtonian fluid also are described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.