Ion beam angle calibration and emittance measurement system for ribbon beams

US8168941B2 · kind B2 · utility

Assignee

• Axcelis Technologies, Inc. · US

Inventors

• Marvin Farley · Ipswich, US
• Donald N. Polner · Marblehead, US
• Geoffrey Ryding · Attleboro, US
• Theodore H. Smick · Essex, US
• Takao Sakase · Rowley, US
• Ronald Horner · Waltham, US
• Edward C. Eisner · Lexington, US
• Paul Eide · Stratham, US
• Brian S. Freer · Medford, US
• Mark Lambert · Lake Oswego, US
• Donovan Beckel · Wakefield, US

Key dates

• Filing date: Jan 22, 2009
• Grant date: May 1, 2012
• Expiry date: Nov 19, 2029

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/24542
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

An ion beam angle calibration and emittance measurement system, comprising a plate comprising an elongated slit therein, wherein the elongated slit positioned at a rotation center of the plate and configured to allow a first beam portion to pass therethrough. A beam current detector located downstream of the plate, wherein the beam current detector comprises a slit therein configured to permit a second beam portion of the first beam portion to pass therethrough, wherein the beam current detector is configured to measure a first beam current associated with the first beam portion. A beam angle detector is located downstream of the beam current detector and configured to detect a second beam current associated with the second beam portion. The plate, the current beam detector and the beam angle detector are configured to collectively rotate about the rotation center of the plate.