Brian S. Freer
11Patents
5h-index
28Co-inventors
62Inventor score
Filing activity: Sep 8, 1997 → Jan 22, 2009
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6221169A | System and method for cleaning contaminated surfaces in an ion implanter | Electricity | 31 | Expired |
| US6828572B2 | Ion beam incident angle detector for ion implant systems | Electricity | 16 | Expired |
| US6215125A | Method to operate GEF4 gas in hot cathode discharge ion sources | Electricity | 15 | Expired |
| US5909031A | Ion implanter electron shower having enhanced secondary electron emission | Electricity | 9 | Expired |
| US5903009A | Biased and serrated extension tube for ion implanter electron shower | Electricity | 9 | Expired |
| US7435977B2 | Ion beam angle measurement systems and methods for ion implantation systems | Electricity | 3 | Active |
| US7598495B2 | Methods and systems for trapping ion beam particles and focusing an ion beam | Electricity | 1 | Active |
| US8168941B2 | Ion beam angle calibration and emittance measurement system for ribbon beams | Electricity | 1 | Active |
| US7476876B2 | Ion beam angle measurement systems and methods employing varied angle slot arrays for ion implantation systems | Electricity | 0 | Active |
| US9103031B2 | Method and system for growing a thin film using a gas cluster ion beam | Electricity | 0 | Active |
| US7557363B2 | Closed loop dose control for ion implantation | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.