Inventor · Medford, MA, US

Brian S. Freer

11Patents
5h-index
28Co-inventors
62Inventor score

Filing activity: Sep 8, 1997 → Jan 22, 2009

Most-cited inventions

PatentTitleAreaCited byStatus
US6221169A System and method for cleaning contaminated surfaces in an ion implanter Electricity 31 Expired
US6828572B2 Ion beam incident angle detector for ion implant systems Electricity 16 Expired
US6215125A Method to operate GEF4 gas in hot cathode discharge ion sources Electricity 15 Expired
US5909031A Ion implanter electron shower having enhanced secondary electron emission Electricity 9 Expired
US5903009A Biased and serrated extension tube for ion implanter electron shower Electricity 9 Expired
US7435977B2 Ion beam angle measurement systems and methods for ion implantation systems Electricity 3 Active
US7598495B2 Methods and systems for trapping ion beam particles and focusing an ion beam Electricity 1 Active
US8168941B2 Ion beam angle calibration and emittance measurement system for ribbon beams Electricity 1 Active
US7476876B2 Ion beam angle measurement systems and methods employing varied angle slot arrays for ion implantation systems Electricity 0 Active
US9103031B2 Method and system for growing a thin film using a gas cluster ion beam Electricity 0 Active
US7557363B2 Closed loop dose control for ion implantation Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.