Catadioptric projection objective

US8208199B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• David Shafer · Fairfield, US
• Wilhelm Ulrich · Aalen, DE
• Aurelian Dodoc · Heidenheim an der Brenz, DE
• Rudolf Von Buenau · Jena, DE
• Hans-Juergen Mann · Oberkochen, DE
• Alexander Epple · Aalen, DE
• Susanne Beder · Aalen, DE
• Wolfgang Singer · Aalen, DE

Key dates

• Filing date: Mar 23, 2009
• Grant date: Jun 26, 2012
• Expiry date: Apr 1, 2029

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B13/22
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter Dmax, a maximum image field height Y′, and an image side numerical aperture NA; wherein COMP1=Dmax/(Y′·NA2) and wherein the condition COMP1<10 holds.