Methods of forming capacitors having dielectric regions that include multiple metal oxide-comprising materials
US8236372B2 · kind B2 · utility
3Cited by
10References
25Claims
0Family size
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Key dates
| Filing date | Jun 12, 2009 |
| Grant date | Aug 7, 2012 |
| Priority date | — |
| Expiry date | Sep 22, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/68
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Capacitors and methods of forming capacitors are disclosed, and which include an inner conductive metal capacitor electrode and an outer conductive metal capacitor electrode. A capacitor dielectric region is received between the inner and the outer conductive metal capacitor electrodes and has a thickness no greater than 150 Angstroms. Various combinations of materials of thicknesses and relationships relative one another are disclosed which enables and results in the dielectric region having a dielectric constant k of at least 35 yet leakage current no greater than 1×10−7 amps/cm2 at from −1.1V to +1.1V.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.