Capacitors having dielectric regions that include multiple metal oxide-comprising materials
US8861179B2 · kind B2 · utility
2Cited by
13References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 29, 2012 |
| Grant date | Oct 14, 2014 |
| Priority date | — |
| Expiry date | Aug 29, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B12/00
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Capacitors and methods of forming capacitors are disclosed, and which include an inner conductive metal capacitor electrode and an outer conductive metal capacitor electrode. A capacitor dielectric region is received between the inner and the outer conductive metal capacitor electrodes and has a thickness no greater than 150 Angstroms. Various combinations of materials of thicknesses and relationships relative one another are disclosed which enables and results in the dielectric region having a dielectric constant k of at least 35 yet leakage current no greater than 1×10−7 amps/cm2 at from −1.1V to +1.1V.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.