Patent · US Active

Ion sources, systems and methods

US9012867B2 · kind B2 · utility

1Cited by

108References

20Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Billy W. Ward · Merrimac, US
John A. Notte, IV · Gloucester, US
Louis S. Farkas, III · Durham, US
Randall G. Percival · Raymond, US
Raymond Hill · Rowley, US
Klaus Edinger · Lorsch, DE
Lars Markwort · Haimhausen, DE
Dirk Aderhold · Ellwangen (Jagst), DE
Ulrich Mantz · Heroldstatt, DE

Key dates

Filing date	May 23, 2014
Grant date	Apr 21, 2015
Priority date	—
Expiry date	May 23, 2034

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/31755
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Ion sources, systems and methods are disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.