Patent · US Active

Ion sources, systems and methods

US9236225B2 · kind B2 · utility

1Cited by

113References

23Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Billy W. Ward · Merrimac, US
John A. Notte, IV · Gloucester, US
Louis S. Farkas, III · Durham, US
Randall G. Percival · Raymond, US
Raymond Hill · Rowley, US
Klaus Edinger · Lorsch, DE
Lars Markwort · Haimhausen, DE
Dirk Aderhold · Ellwangen (Jagst), DE
Ulrich Mantz · Heroldstatt, DE

Key dates

Filing date	Apr 13, 2015
Grant date	Jan 12, 2016
Priority date	—
Expiry date	Apr 13, 2035

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/31755
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Ion sources, systems and methods are disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.