Axus Technology, LLC
10Patents
10Active
10Granted
47Portfolio score
Filing activity: Aug 12, 2011 → Jan 12, 2024
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11904431B2 | Method and apparatus for insitu adjustment of wafer slip detection during work piece polishing | Electricity | 1 | Active |
| US12145236B2 | Containment and exhaust system for substrate polishing components | Performing Operations; Transporting | 0 | Active |
| US12217979B2 | Temperature controlled substrate carrier and polishing components | Electricity | 0 | Active |
| US12377520B2 | Method and apparatus for insitu adjustment of wafer slip detection during work piece polishing | Electricity | 0 | Active |
| US11685012B2 | Planarized membrane and methods for substrate processing systems | Chemistry; Metallurgy | 0 | Active |
| US12198935B2 | Atmospheric plasma in wafer processing system optimization | Electricity | 0 | Active |
| US12023778B2 | Substrate carrier head and processing system | Performing Operations; Transporting | 0 | Active |
| US8944887B2 | Apparatus and method for surface grinding and edge trimming workpieces | Performing Operations; Transporting | 0 | Active |
| US9390903B2 | Method and apparatus for wafer backgrinding and edge trimming on one machine | Electricity | 0 | Active |
| US11376705B2 | Chemical mechanical planarization carrier system | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.