Patent assignee · US · COMPANY

Kobe Precision Inc.

8Patents
0Active
8Granted
27Portfolio score

Filing activity: Aug 17, 1994 → May 16, 2005

Most-cited patents

PatentTitleAreaCited byStatus
US5622875A Method for reclaiming substrate from semiconductor wafers Emerging Cross-Sectional Technologies 46 Expired
US5855735A Process for recovering substrates Electricity 45 Expired
US6406923B1 Process for reclaiming wafer substrates Electricity 17 Expired
US6451696B1 Method for reclaiming wafer substrate and polishing solution compositions therefor Electricity 15 Expired
US6384415B1 Method of evaluating quality of silicon wafer and method of reclaiming the water Physics 10 Expired
US7452481B2 Polishing slurry and method of reclaiming wafers Electricity 10 Expired
US6884634B2 Specifying method for Cu contamination processes and detecting method for Cu contamination during reclamation of silicon wafers, and reclamation method of silicon wafers Electricity 9 Expired
US7699997B2 Method of reclaiming silicon wafers Electricity 1 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.