Inventor · Horsham, GB

Adrian Murrell

17Patents
7h-index
27Co-inventors
58Inventor score

Filing activity: May 29, 2001 → Jan 3, 2008

Most-cited inventions

PatentTitleAreaCited byStatus
US6559454B1 Ion beam generation apparatus Electricity 35 Expired
US6818909B2 Ion sources for ion implantation apparatus Electricity 34 Expired
US6908836B2 Method of implanting a substrate and an ion implanter for performing the method Electricity 12 Expired
US6686601B2 Ion sources for ion implantation apparatus Electricity 11 Expired
US6847043B2 Ion sources for ion implantation apparatus Electricity 9 Expired
US6956223B2 Multi-directional scanning of movable member and ion beam monitoring arrangement therefor Electricity 9 Expired
US7087913B2 Ion implanter electrodes Electricity 8 Expired
US7838849B2 Ion implanters Electricity 7 Active
US7049210B2 Method of implanting a substrate and an ion implanter for performing the method Electricity 6 Expired
US7282427B1 Method of implanting a substrate and an ion implanter for performing the method Electricity 4 Expired
US7586101B2 Ion sources for ion implantation apparatus Electricity 4 Active
US7253424B2 Method of implanting a substrate and an ion implanter for performing the method Electricity 3 Expired
US7928413B2 Ion implanters Electricity 3 Active
US7807984B2 Ion implanters Electricity 2 Active
US7611975B2 Method of implanting a substrate and an ion implanter for performing the method Emerging Cross-Sectional Technologies 1 Active
US7235797B2 Method of implanting a substrate and an ion implanter for performing the method Electricity 1 Expired
US7351986B2 Method and apparatus for reducing cross contamination of species during ion implantation Electricity 1 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.