Inventor · Milpitas, CA, US

Been-Der Chen

17Patents
5h-index
18Co-inventors
59Inventor score

Filing activity: Jun 15, 2007 → Oct 23, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US7707538B2 Multivariable solver for optical proximity correction Physics 20 Active
US8443312B2 Method and apparatus for enhancing signal strength for improved generation and placement of model-based sub-resolution assist features (MB-SRAF) Physics 12 Active
US9619607B2 Method and apparatus for cost function based simultaneous OPC and SBAR optimization Physics 6 Active
US8812998B2 Method and apparatus for cost function based simultaneous OPC and SBAR optimization Physics 6 Active
US8560979B2 Local multivariable solver for optical proximity correction in lithographic processing method, and device manufactured thereby Physics 6 Active
US11176307B2 Method and system for pattern configuration Physics 4 Active
US8826198B2 Method and apparatus for enhancing signal strength for improved generation and placement of model-based sub-resolution assist features (MB-SRAF) Physics 3 Active
US8938699B2 Multivariable solver for optical proximity correction Physics 3 Active
US8239786B2 Local multivariable solver for optical proximity correction in lithographic processing method, and device manufactured thereby Physics 3 Active
US9418194B2 Method and apparatus for model based flexible MRC Physics 2 Active
US8291352B2 Multivariable solver for optical proximity correction Physics 2 Active
US11232249B2 Method for determining curvilinear patterns for patterning device Physics 2 Active
US8448099B2 Multivariable solver for optical proximity correction Physics 2 Active
US11797748B2 Method for generating patterning device pattern at patch boundary Physics 1 Active
US11734490B2 Method for determining curvilinear patterns for patterning device Physics 0 Active
US12430490B2 Method for generating patterning device pattern at patch boundary Physics 0 Active
US8806389B2 Method and apparatus for model based flexible MRC Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.