Inventor · Sunnyvale, CA, US

Bingxi Sun

10Patents
9h-index
5Co-inventors
57Inventor score

Filing activity: Feb 6, 1997 → Apr 22, 2003

Most-cited inventions

PatentTitleAreaCited byStatus
US6066892A Copper alloy seed layer for copper metallization in an integrated circuit Electricity 107 Expired
US6037257A Sputter deposition and annealing of copper alloy metallization Electricity 84 Expired
US6387805B2 Copper alloy seed layer for copper metallization Electricity 44 Expired
US6160315A Copper alloy via structure Electricity 38 Expired
US6174811A Integrated deposition process for copper metallization Electricity 27 Expired
US6566259B1 Integrated deposition process for copper metallization Electricity 19 Expired
US6313033A Ionized metal plasma Ta, TaNx, W, and WNx liners for gate electrode applications Electricity 19 Expired
US6217715A Coating of vacuum chambers to reduce pump down time and base pressure Electricity 18 Expired
US6488823B1 Stress tunable tantalum and tantalum nitride films Electricity 17 Expired
US6881673B2 Integrated deposition process for copper metallization Electricity 3 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.