Bongjin Kuh
10Patents
2h-index
31Co-inventors
50Inventor score
Filing activity: May 28, 2008 → Apr 14, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9957617B2 | Deposition system for forming thin layer | Electricity | 4 | Active |
| US10822694B2 | Substrate processing apparatus and method of cleaning the same | Chemistry; Metallurgy | 3 | Active |
| US9537029B2 | Semiconductor device with an epitaxial layer and method of fabricating the same | Emerging Cross-Sectional Technologies | 0 | Active |
| US9728666B2 | Semiconductor device and method for fabricating the same | Emerging Cross-Sectional Technologies | 0 | Active |
| US9443932B2 | Semiconductor device and method of fabricating the same | Electricity | 0 | Active |
| US10607832B2 | Method and apparatus for forming a thin layer | Electricity | 0 | Active |
| US8105930B2 | Method of forming dielectric including dysprosium and scandium by atomic layer deposition and integrated circuit device including the dielectric layer | Electricity | 0 | Active |
| US12310075B2 | Integrated circuit devices including vertically stacked field effect transistors | Electricity | 0 | Active |
| US11854864B2 | Semiconductor device including trench isolation layer and method of forming the same | Electricity | 0 | Active |
| US11211284B2 | Semiconductor device including trench isolation layer and method of forming the same | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.