Inventor · Irvine, CA, US

Bum Jick Kim

9Patents
2h-index
14Co-inventors
40Inventor score

Filing activity: Oct 24, 2014 → Aug 26, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US10350728B2 System and process for in situ byproduct removal and platen cooling during CMP Electricity 7 Active
US10967483B2 Slurry distribution device for chemical mechanical polishing Electricity 2 Active
US11077536B2 Slurry distribution device for chemical mechanical polishing Electricity 2 Active
US9452506B2 Vacuum cleaning systems for polishing pads, and related methods Performing Operations; Transporting 2 Active
US9687960B2 Polishing pad cleaning systems employing fluid outlets oriented to direct fluid under spray bodies and towards inlet ports, and related methods Performing Operations; Transporting 1 Active
US12076877B2 Polishing platens and polishing platen manufacturing methods Performing Operations; Transporting 0 Active
US11806835B2 Slurry distribution device for chemical mechanical polishing Electricity 0 Active
US11389925B2 Offset head-spindle for chemical mechanical polishing Performing Operations; Transporting 0 Active
US11986926B2 Slurry distribution device for chemical mechanical polishing Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.