Chia-Hung Chung
11Patents
3h-index
31Co-inventors
60Inventor score
Filing activity: Feb 6, 2002 → Aug 9, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6938505B2 | Chamber wafer detection | Emerging Cross-Sectional Technologies | 14 | Expired |
| US6775918B2 | Wafer cassette pod equipped with position sensing device | Emerging Cross-Sectional Technologies | 7 | Expired |
| US7254513B2 | Fault detection and classification (FDC) specification management apparatus and method thereof | Emerging Cross-Sectional Technologies | 5 | Expired |
| US8748885B2 | Soft material wafer bonding and method of bonding | Electricity | 1 | Active |
| US11004709B2 | Method for monitoring gas in wafer processing system | Electricity | 1 | Active |
| US6755602B2 | Wafer transport pod with linear door opening mechanism | Emerging Cross-Sectional Technologies | 1 | Expired |
| US8592297B2 | Wafer and method of processing wafer | Electricity | 0 | Active |
| US11454891B2 | Manufacturing method of semiconductor device and semiconductor processing system | Electricity | 0 | Active |
| US11899368B2 | Manufacturing method of semiconductor device and semiconductor processing system | Electricity | 0 | Active |
| US11061333B2 | Manufacturing method of semiconductor device and semiconductor processing system | Electricity | 0 | Active |
| US10943802B2 | Photoresist bottle container | Mechanical Engineering; Lighting; Heating | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.