Inventor · San Jose, CA, US

Deqi Wang

18Patents

11h-index

13Co-inventors

65Inventor score

Filing activity: Oct 2, 2012 → Oct 8, 2021

Most-cited inventions

Patent	Title	Area	Cited by	Status
US9240347B2	Tungsten feature fill	Electricity	59	Active
US9653353B2	Tungsten feature fill	Electricity	46	Active
US8853080B2	Method for depositing tungsten film with low roughness and low resistivity	Electricity	37	Active
US9034760B2	Methods of forming tensile tungsten films and compressive tungsten films	Electricity	23	Active
US10211099B2	Chamber conditioning for remote plasma process	Electricity	22	Active
US10103058B2	Tungsten feature fill	Electricity	22	Active
US10256142B2	Tungsten feature fill with nucleation inhibition	Electricity	21	Active
US9997405B2	Feature fill with nucleation inhibition	Electricity	18	Active
US10170320B2	Feature fill with multi-stage nucleation inhibition	Electricity	17	Active
US9589808B2	Method for depositing extremely low resistivity tungsten	Electricity	15	Active
US10580695B2	Feature fill with nucleation inhibition	Electricity	12	Active
US11075115B2	Tungsten feature fill	Electricity	10	Active
US10580654B2	Feature fill with multi-stage nucleation inhibition	Electricity	10	Active
US10916434B2	Feature fill with multi-stage nucleation inhibition	Electricity	8	Active
US11410883B2	Tungsten feature fill with nucleation inhibition	Electricity	4	Active
US11901227B2	Feature fill with nucleation inhibition	Electricity	2	Active
US11532685B2	Doubled-side display device and manufacturing method thereof	Electricity	0	Active
US11315983B2	Display panel including multiple pixel units and display device	Electricity	0	Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.