Enle CHOO
6Patents
0h-index
27Co-inventors
34Inventor score
Filing activity: Jun 29, 2020 → Apr 8, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11261538B1 | In-situ temperature mapping for epi chamber | Electricity | 0 | Active |
| US12165934B2 | Substrate processing monitoring | Electricity | 0 | Active |
| US12324061B2 | Epitaxial deposition chamber | Electricity | 0 | Active |
| US12196617B2 | Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber | Electricity | 0 | Active |
| US11848202B2 | Growth monitor system and methods for film deposition | Physics | 0 | Active |
| US12385159B2 | In-situ epi growth rate control of crystal thickness micro-balancing sensor | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.