Frederick Wu
12Patents
9h-index
32Co-inventors
68Inventor score
Filing activity: Sep 30, 1998 → May 28, 2008
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6939804B2 | Formation of composite tungsten films | Electricity | 90 | Expired |
| US6524952B1 | Method of forming a titanium silicide layer on a substrate | Emerging Cross-Sectional Technologies | 89 | Expired |
| US7850779B2 | Apparatus and process for plasma-enhanced atomic layer deposition | Electricity | 51 | Active |
| US7682946B2 | Apparatus and process for plasma-enhanced atomic layer deposition | Electricity | 35 | Active |
| US7605083B2 | Formation of composite tungsten films | Electricity | 32 | Active |
| US7833358B2 | Method of recovering valuable material from exhaust gas stream of a reaction chamber | Emerging Cross-Sectional Technologies | 16 | Active |
| US6242347A | Method for cleaning a process chamber | Emerging Cross-Sectional Technologies | 14 | Expired |
| US7384867B2 | Formation of composite tungsten films | Electricity | 12 | Active |
| US9032906B2 | Apparatus and process for plasma-enhanced atomic layer deposition | Electricity | 9 | Active |
| US6221174A | Method of performing titanium/titanium nitride integration | Electricity | 6 | Expired |
| US6548402B2 | Method of depositing a thick titanium nitride film | Electricity | 6 | Expired |
| US6482746B2 | Computer readable medium for controlling a method of cleaning a process chamber | Emerging Cross-Sectional Technologies | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.