Inventor · Vilshofen an der Donau, DE

Guenter Schwab

8Patents
2h-index
12Co-inventors
40Inventor score

Filing activity: May 3, 2007 → Nov 13, 2012

Most-cited inventions

PatentTitleAreaCited byStatus
US7938911B2 Process for cleaning a semiconductor wafer using a cleaning solution Chemistry; Metallurgy 7 Active
US8070882B2 Method for the wet-chemical treatment of a semiconductor wafer Electricity 6 Active
US7538008B2 Method for producing a layer structure Electricity 1 Active
US7972963B2 Polished semiconductor wafer and process for producing it Electricity 0 Active
US8580046B2 Method for the treatment of a semiconductor wafer Electricity 0 Active
US8372213B2 Method for the treatment of a semiconductor wafer Electricity 0 Active
US8685270B2 Method for producing a semiconductor wafer Electricity 0 Active
US9230794B2 Process for cleaning, drying and hydrophilizing a semiconductor wafer Chemistry; Metallurgy 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.