Inventor · Seoul, KR

Hai-sub Na

9Patents
3h-index
30Co-inventors
53Inventor score

Filing activity: Sep 19, 2000 → Nov 3, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US6576589B1 Method for making anatase type titanium dioxide photocatalyst Chemistry; Metallurgy 31 Expired
US8715911B2 Coating composition for DUV filtering, method of forming photoresist pattern using the same and method of fabricating semiconductor device by using the method Physics 7 Active
US8895226B2 Coating composition for DUV filtering, method of forming photoresist pattern using the same and method of fabricating semiconductor device by using the method Physics 4 Active
US9837272B2 Methods of manufacturing semiconductor devices Electricity 2 Active
US10062571B2 Method of manufacturing semiconductor device Electricity 1 Active
US9773672B2 Method of forming micropatterns Electricity 1 Active
US6743567B2 Polymer for data storage, data storage media coated by the same, data storage device and method using data storage media Emerging Cross-Sectional Technologies 0 Expired
US8536347B2 Photoacid generator, chemically amplified resist composition including the same, and associated methods Physics 0 Active
US10468250B2 Rinse solution and method of fabricating integrated circuit device by using the same Chemistry; Metallurgy 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.