He Hui Peng
14Patents
1h-index
15Co-inventors
47Inventor score
Filing activity: Sep 8, 2011 → Aug 8, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9630295B2 | Mechanisms for removing debris from polishing pad | Electricity | 18 | Active |
| US9269585B2 | Method for cleaning metal gate surface | Electricity | 1 | Active |
| US10875148B2 | Apparatus and methods for chemical mechanical polishing | Electricity | 1 | Active |
| US8703612B2 | Process for forming contact plugs | Electricity | 0 | Active |
| US11410846B2 | Method for metal gate surface clean | Electricity | 0 | Active |
| US9633832B2 | Method for metal gate surface clean | Electricity | 0 | Active |
| US11602821B2 | Wafer polishing head, system thereof, and method using the same | Electricity | 0 | Active |
| US10847359B2 | Method for metal gate surface clean | Electricity | 0 | Active |
| US9723915B2 | Brush cleaning method | Performing Operations; Transporting | 0 | Active |
| US9119464B2 | Brush cleaning system | Performing Operations; Transporting | 0 | Active |
| US10875143B2 | Apparatus and methods for chemical mechanical polishing | Electricity | 0 | Active |
| US11772227B2 | Device and methods for chemical mechanical polishing | Performing Operations; Transporting | 0 | Active |
| US11999027B2 | Method for polishing semiconductor substrate | Electricity | 0 | Active |
| US11996283B2 | Method for metal gate surface clean | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.