Inventor · San Diego, CA, US

Heather Regina Bowen

13Patents
7h-index
19Co-inventors
59Inventor score

Filing activity: Jan 17, 2002 → Mar 17, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US8993072B2 Halogenated organoaminosilane precursors and methods for depositing films comprising same Electricity 269 Active
US8460753B2 Methods for depositing silicon dioxide or silicon oxide films using aminovinylsilanes Electricity 21 Active
US8940648B2 Process for producing silicon and oxide films from organoaminosilane precursors Electricity 20 Active
US8530361B2 Process for producing silicon and oxide films from organoaminosilane precursors Electricity 16 Active
US9243324B2 Methods of forming non-oxygen containing silicon-based films Chemistry; Metallurgy 14 Active
US8912353B2 Organoaminosilane precursors and methods for depositing films comprising same Chemistry; Metallurgy 11 Active
US7678422B2 Cyclic chemical vapor deposition of metal-silicon containing films Chemistry; Metallurgy 7 Active
US8039658B2 Removal of trace arsenic impurities from triethylphosphate (TEPO) Chemistry; Metallurgy 2 Active
US6770254B2 Purification of group IVb metal halides Chemistry; Metallurgy 1 Expired
US7442822B2 Stabilization of nitrogen-containing and oxygen-containing organosilanes using weakly basic ion-exchange resins Chemistry; Metallurgy 0 Active
US7727401B2 Selective purification of mono-terpenes for removal of oxygen containing species Performing Operations; Transporting 0 Active
US9627193B2 Organoaminodisilane precursors and methods for depositing films comprising same Emerging Cross-Sectional Technologies 0 Active
US10077364B2 Organoaminodisilane precursors and methods for depositing films comprising same Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.