Hiroki Sasano
8Patents
6h-index
9Co-inventors
48Inventor score
Filing activity: Sep 9, 2002 → Nov 30, 2008
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6960416B2 | Method and apparatus for controlling etch processes during fabrication of semiconductor devices | Electricity | 46 | Expired |
| US7094613B2 | Method for controlling accuracy and repeatability of an etch process | Electricity | 21 | Expired |
| US6858361B2 | Methodology for repeatable post etch CD in a production tool | Electricity | 19 | Expired |
| US6924088B2 | Method and system for realtime CD microloading control | Emerging Cross-Sectional Technologies | 11 | Expired |
| US7498106B2 | Method and apparatus for controlling etch processes during fabrication of semiconductor devices | Electricity | 10 | Active |
| US7482178B2 | Chamber stability monitoring using an integrated metrology tool | Electricity | 7 | Expired |
| US8133817B2 | Shallow trench isolation etch process | Electricity | 6 | Active |
| US7262865B2 | Method and apparatus for controlling a calibration cycle or a metrology tool | Electricity | 5 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.