Inventor · Fremont, CA, US

James E. Tappan

24Patents
5h-index
19Co-inventors
66Inventor score

Filing activity: Dec 11, 1990 → Feb 22, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US5200232A Reaction chamber design and method to minimize particle generation in chemical vapor deposition reactors Electricity 95 Expired
US8552334B2 Adjustable gap capacitively coupled RF plasma reactor including lateral bellows and non-contact particle seal Electricity 59 Active
US8038796B2 Apparatus for spatial and temporal control of temperature on a substrate Emerging Cross-Sectional Technologies 19 Expired
US5368646A Reaction chamber design to minimize particle generation in chemical vapor deposition reactors Electricity 18 Expired
US8735765B2 Adjustable gap capacitively coupled RF plasma reactor including lateral bellows and non-contact particle seal Electricity 6 Active
US8257548B2 Electrode orientation and parallelism adjustment mechanism for plasma processing systems Electricity 5 Active
US8735298B2 Method for spatial and temporal control of temperature on a substrate Emerging Cross-Sectional Technologies 4 Active
US6998095B2 Loop dilution system Emerging Cross-Sectional Technologies 4 Expired
US10049862B2 Chamber with vertical support stem for symmetric conductance and RF delivery Electricity 3 Active
US8051556B2 Method of manufacturing apparatus for spatial and temporal control of temperature on a substrate Emerging Cross-Sectional Technologies 3 Active
US8394233B2 Electrode orientation and parallelism adjustment mechanism for plasma processing systems Electricity 2 Active
US7439499B2 Multiple electrospray probe interface for mass spectrometry Electricity 2 Active
US8821639B2 Apparatus for spatial and temporal control of temperature on a substrate Emerging Cross-Sectional Technologies 2 Active
US8900404B2 Plasma processing systems with mechanisms for controlling temperatures of components Electricity 2 Active
US8438712B2 Floating collar clamping device for auto-aligning nut and screw in linear motion leadscrew and nut assembly Emerging Cross-Sectional Technologies 1 Active
US7132080B2 Module for automated matrix removal Emerging Cross-Sectional Technologies 1 Expired
US10037869B2 Plasma processing devices having multi-port valve assemblies Electricity 1 Active
US9103416B2 Floating collar clamping device for auto-aligning nut and screw in linear motion leadscrew and nut assembly and methods thereof Emerging Cross-Sectional Technologies 1 Active
US10665435B2 Chamber with vertical support stem for symmetric conductance and RF delivery Electricity 1 Active
US11302556B2 Apparatus for spatial and temporal control of temperature on a substrate Emerging Cross-Sectional Technologies 0 Active
US12406872B2 Semiconductor processing chamber with dual-lift mechanism for edge ring elevation management Electricity 0 Active
US10636689B2 Apparatus for spatial and temporal control of temperature on a substrate Emerging Cross-Sectional Technologies 0 Active
US12100575B2 Plasma processing devices having multi-port valve assemblies Electricity 0 Active
US10395902B2 Chamber with vertical support stem for symmetric conductance and RF delivery Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.