James E. Tappan
24Patents
5h-index
19Co-inventors
66Inventor score
Filing activity: Dec 11, 1990 → Feb 22, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5200232A | Reaction chamber design and method to minimize particle generation in chemical vapor deposition reactors | Electricity | 95 | Expired |
| US8552334B2 | Adjustable gap capacitively coupled RF plasma reactor including lateral bellows and non-contact particle seal | Electricity | 59 | Active |
| US8038796B2 | Apparatus for spatial and temporal control of temperature on a substrate | Emerging Cross-Sectional Technologies | 19 | Expired |
| US5368646A | Reaction chamber design to minimize particle generation in chemical vapor deposition reactors | Electricity | 18 | Expired |
| US8735765B2 | Adjustable gap capacitively coupled RF plasma reactor including lateral bellows and non-contact particle seal | Electricity | 6 | Active |
| US8257548B2 | Electrode orientation and parallelism adjustment mechanism for plasma processing systems | Electricity | 5 | Active |
| US8735298B2 | Method for spatial and temporal control of temperature on a substrate | Emerging Cross-Sectional Technologies | 4 | Active |
| US6998095B2 | Loop dilution system | Emerging Cross-Sectional Technologies | 4 | Expired |
| US10049862B2 | Chamber with vertical support stem for symmetric conductance and RF delivery | Electricity | 3 | Active |
| US8051556B2 | Method of manufacturing apparatus for spatial and temporal control of temperature on a substrate | Emerging Cross-Sectional Technologies | 3 | Active |
| US8394233B2 | Electrode orientation and parallelism adjustment mechanism for plasma processing systems | Electricity | 2 | Active |
| US7439499B2 | Multiple electrospray probe interface for mass spectrometry | Electricity | 2 | Active |
| US8821639B2 | Apparatus for spatial and temporal control of temperature on a substrate | Emerging Cross-Sectional Technologies | 2 | Active |
| US8900404B2 | Plasma processing systems with mechanisms for controlling temperatures of components | Electricity | 2 | Active |
| US8438712B2 | Floating collar clamping device for auto-aligning nut and screw in linear motion leadscrew and nut assembly | Emerging Cross-Sectional Technologies | 1 | Active |
| US7132080B2 | Module for automated matrix removal | Emerging Cross-Sectional Technologies | 1 | Expired |
| US10037869B2 | Plasma processing devices having multi-port valve assemblies | Electricity | 1 | Active |
| US9103416B2 | Floating collar clamping device for auto-aligning nut and screw in linear motion leadscrew and nut assembly and methods thereof | Emerging Cross-Sectional Technologies | 1 | Active |
| US10665435B2 | Chamber with vertical support stem for symmetric conductance and RF delivery | Electricity | 1 | Active |
| US11302556B2 | Apparatus for spatial and temporal control of temperature on a substrate | Emerging Cross-Sectional Technologies | 0 | Active |
| US12406872B2 | Semiconductor processing chamber with dual-lift mechanism for edge ring elevation management | Electricity | 0 | Active |
| US10636689B2 | Apparatus for spatial and temporal control of temperature on a substrate | Emerging Cross-Sectional Technologies | 0 | Active |
| US12100575B2 | Plasma processing devices having multi-port valve assemblies | Electricity | 0 | Active |
| US10395902B2 | Chamber with vertical support stem for symmetric conductance and RF delivery | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.