Inventor · Palo Alto, CA, US

Jean Lu

6Patents
5h-index
20Co-inventors
63Inventor score

Filing activity: Mar 14, 2000 → Sep 10, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US6342133B2 PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutter Electricity 51 Expired
US6613199B1 Apparatus and method for physical vapor deposition using an open top hollow cathode magnetron Electricity 28 Expired
US6589398B1 Pasting method for eliminating flaking during nitride sputtering Electricity 11 Expired
US6471831B2 Apparatus and method for improving film uniformity in a physical vapor deposition system Electricity 8 Expired
US6468404B2 Apparatus and method for reducing redeposition in a physical vapor deposition system Electricity 6 Expired
US11802349B2 Method for depositing high quality PVD films Chemistry; Metallurgy 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.