Inventor · Cambridge, MA, US

Jill S. Becker

14Patents

4h-index

9Co-inventors

49Inventor score

Filing activity: Sep 28, 2001 → May 23, 2016

Most-cited inventions

Patent	Title	Area	Cited by	Status
US8202575B2	Vapor deposition systems and methods	Performing Operations; Transporting	367	Expired
US6969539B2	Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxide	Electricity	54	Expired
US7560581B2	Vapor deposition of tungsten nitride	Electricity	15	Expired
US7507848B2	Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxide	Electricity	9	Active
US8008743B2	Vapor deposition of silicon dioxide nanolaminates	Chemistry; Metallurgy	4	Active
US9777371B2	ALD systems and methods	Chemistry; Metallurgy	3	Active
US9567670B2	Method for high-velocity and atmospheric-pressure atomic layer deposition with substrate and coating head separation distance in the millimeter range	Chemistry; Metallurgy	2	Active
US8334016B2	Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxide	Electricity	1	Active
US9905414B2	Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxide	Electricity	1	Active
US9783888B2	Atomic layer deposition head	Chemistry; Metallurgy	1	Active
US9556519B2	Vapor deposition systems and methods	Performing Operations; Transporting	0	Active
US9328417B2	System and method for thin film deposition	Chemistry; Metallurgy	0	Active
US8536070B2	Vapor deposition of silicon dioxide nanolaminates	Chemistry; Metallurgy	0	Active
US9175388B2	Reaction chamber with removable liner	Chemistry; Metallurgy	0	Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.