Jinyuan Chen
12Patents
5h-index
24Co-inventors
66Inventor score
Filing activity: Aug 30, 1994 → Jun 19, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7503996B2 | Multiple frequency plasma chamber, switchable RF system, and processes using same | Electricity | 21 | Active |
| US5564085A | Cellular telephone RF radiation ameliorating device | Electricity | 20 | Expired |
| US8336488B2 | Multi-station plasma reactor with multiple plasma regions | Electricity | 8 | Active |
| US8366829B2 | Multi-station decoupled reactive ion etch chamber | Electricity | 7 | Active |
| US8111499B2 | System and method of sensing and removing residual charge from a processed wafer | Electricity | 7 | Active |
| US8608851B2 | Plasma confinement apparatus, and method for confining a plasma | Electricity | 3 | Active |
| US8297225B2 | Capacitive CVD reactor and methods for plasma CVD process | Electricity | 2 | Active |
| US10201069B2 | High frequency power supply device and high frequency power supplying method | Electricity | 1 | Active |
| US8975194B2 | Method for manufacturing oxide layer | Electricity | 0 | Active |
| US9271384B2 | Plasma processing apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
| US9208998B2 | Multi-station decoupled reactive ion etch chamber | Electricity | 0 | Active |
| US10187965B2 | Plasma confinement apparatus, and method for confining a plasma | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.