Julia Svirchevski
12Patents
6h-index
18Co-inventors
59Inventor score
Filing activity: Oct 30, 1998 → Oct 12, 2008
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6240588A | Wafer scrubbing brush core | Performing Operations; Transporting | 16 | Expired |
| US6543084B2 | Wafer scrubbing brush core | Performing Operations; Transporting | 15 | Expired |
| US6405399B1 | Method and system of cleaning a wafer after chemical mechanical polishing or plasma processing | Emerging Cross-Sectional Technologies | 12 | Expired |
| US8322045B2 | Single wafer apparatus for drying semiconductor substrates using an inert gas air-knife | Electricity | 9 | Active |
| US6352595B1 | Method and system for cleaning a chemical mechanical polishing pad | Performing Operations; Transporting | 8 | Expired |
| US7063455B2 | Chemical dilution system for semiconductor device processing system | Physics | 6 | Expired |
| US6994611B2 | Method and system for cleaning a chemical mechanical polishing pad | Performing Operations; Transporting | 6 | Expired |
| US6170110A | Apparatus for HF-HF cleaning | Emerging Cross-Sectional Technologies | 4 | Expired |
| US7686935B2 | Pad-assisted electropolishing | Electricity | 4 | Active |
| US7270597B2 | Method and system for chemical mechanical polishing pad cleaning | Performing Operations; Transporting | 3 | Expired |
| US7364349B2 | Chemical dilution system for semiconductor device processing system | Physics | 3 | Expired |
| US6093254A | Method of HF-HF Cleaning | Emerging Cross-Sectional Technologies | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.