Inventor · San Jose, CA, US

Jun Xue

31Patents
5h-index
72Co-inventors
68Inventor score

Filing activity: Nov 19, 2008 → Dec 28, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US9502258B2 Anisotropic gap etch Electricity 129 Active
US9190290B2 Halogen-free gas-phase silicon etch Electricity 97 Active
US9412613B2 Development of high etch selective hardmask material by ion implantation into amorphous carbon films Electricity 49 Active
US9777378B2 Advanced process flow for high quality FCVD films Chemistry; Metallurgy 17 Active
US11314168B2 Underlayer for photoresist adhesion and dose reduction Electricity 12 Active
US8278072B1 Method for synthesis of sialylated products using reversible sialylation Chemistry; Metallurgy 5 Active
US9502262B2 Nanocrystalline diamond carbon film for 3D NAND hardmask application Electricity 4 Active
US8074739B2 Sampling method and sampler for gas hydrates by hole bottom freezing Fixed Constructions 3 Active
US10096466B2 Pulsed plasma for film deposition Electricity 3 Active
US9620407B2 3D material modification for advanced processing Electricity 3 Active
US9852902B2 Material deposition for high aspect ratio structures Electricity 2 Active
US11988965B2 Underlayer for photoresist adhesion and dose reduction Electricity 2 Active
US9865464B2 Nanocrystalline diamond carbon film for 3D NAND hardmask application Electricity 2 Active
US9619107B2 Methods and systems for dynamically displaying icons on a user interface for security check and other functions Physics 2 Active
US11521860B2 Selectively etching for nanowires Electricity 0 Active
US10276369B2 Material deposition for high aspect ratio structures Electricity 0 Active
US12222823B2 User data backup to data partition of storage medium Physics 0 Active
US11360696B2 System startup method and apparatus, electronic device, and storage medium Physics 0 Active
US9534289B2 Plasma process chambers employing distribution grids having focusing surfaces thereon enabling angled fluxes to reach a substrate, and related methods Electricity 0 Active
US10152546B2 Method, system and terminal for performing search in a browser Physics 0 Active
US9595467B2 Air gap formation in interconnection structure by implantation process Electricity 0 Active
US9773675B2 3D material modification for advanced processing Electricity 0 Active
US12187838B2 Preparation method of self-thixotropic polyurethane curing agent, self-thixotropic polyurethane curing agent and application thereof Chemistry; Metallurgy 0 Active
US9520267B2 Bias voltage frequency controlled angular ion distribution in plasma processing Electricity 0 Active
US9382625B2 Remote plasma source based cyclic CVD process for nanocrystalline diamond deposition Chemistry; Metallurgy 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.