Junya Minamida
14Patents
3h-index
21Co-inventors
56Inventor score
Filing activity: Feb 27, 2006 → Aug 25, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8033244B2 | Substrate processing system | Electricity | 6 | Active |
| US7485188B2 | Coating process method and coating process apparatus | Electricity | 6 | Active |
| US10056269B2 | Substrate liquid processing apparatus | Electricity | 3 | Active |
| US10373849B2 | Substrate processing apparatus | Electricity | 2 | Active |
| US8978670B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 2 | Active |
| US11404295B2 | Substrate processing apparatus | Electricity | 1 | Active |
| US7918242B2 | Processing solution supply system, processing solution supply method and recording medium for storing processing solution supply control program | Emerging Cross-Sectional Technologies | 1 | Active |
| US9666463B2 | Substrate processing apparatus | Electricity | 1 | Active |
| US10186433B2 | Substrate processing apparatus | Performing Operations; Transporting | 0 | Active |
| US10128132B2 | Substrate liquid processing apparatus | Electricity | 0 | Active |
| US11670527B2 | Substrate processing apparatus | Electricity | 0 | Active |
| US11998954B2 | Substrate processing apparatus and substrate processing method | Electricity | 0 | Active |
| US9842747B2 | Substrate liquid processing apparatus, exhaust switching unit and substrate liquid processing method | Electricity | 0 | Active |
| US8662811B2 | Substrate processing apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.