Kazuo Saki
8Patents
4h-index
21Co-inventors
57Inventor score
Filing activity: Jul 2, 1997 → Feb 24, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5960297A | Shallow trench isolation structure and method of forming the same | Electricity | 155 | Expired |
| US6291300A | Manufacturing method of semiconductor devices | Electricity | 6 | Expired |
| US7700156B2 | Method and apparatus for forming silicon oxide film | Electricity | 5 | Active |
| US7082346B2 | Semiconductor manufacturing apparatus and semiconductor device manufacturing method | Chemistry; Metallurgy | 4 | Expired |
| US9917182B1 | Semiconductor device | Electricity | 3 | Active |
| US6251801A | Method and apparatus for manufacturing semiconductor device | Electricity | 2 | Expired |
| US9852911B2 | Field effect transistor | Electricity | 0 | Active |
| US6759314B1 | Method for manufacturing semiconductor devices using thermal nitride films as gate insulating films | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.