Inventor · Kuwana, JP

Kei Hattori

17Patents
8h-index
48Co-inventors
72Inventor score

Filing activity: Jul 27, 1987 → Sep 16, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US5411631A Dry etching method Chemistry; Metallurgy 46 Expired
US5221450A Electrostatic chucking method Electricity 33 Expired
US5161201A Method of and apparatus for measuring pattern profile Physics 30 Expired
US5851641A Electrostatic chucking device Emerging Cross-Sectional Technologies 20 Expired
US5645921A Electrostatic chucking device Emerging Cross-Sectional Technologies 15 Expired
US6274507A Plasma processing apparatus and method Emerging Cross-Sectional Technologies 13 Expired
US4785714A Positive-displacement fluid motor having self-stopping function, and method and control circuit for stopping the motor Mechanical Engineering; Lighting; Heating 12 Expired
US5846886A Metal film etching method Electricity 10 Expired
US9922991B2 Semiconductor memory device and method for manufacturing same Electricity 6 Active
US9458885B2 Sliding bearing and image forming apparatus Physics 5 Active
US9810215B2 Internal gear pump Mechanical Engineering; Lighting; Heating 3 Active
US8021565B2 Surface treatment method, etching method, and method for manufacturing electronic device Emerging Cross-Sectional Technologies 1 Active
US11007572B2 Sliding member and method for producing same Performing Operations; Transporting 0 Active
US9269540B2 Ion implantation apparatus and method of determining state of ion implantation apparatus Electricity 0 Active
US10355364B2 Waveguide slot antenna and method for producing same Electricity 0 Active
US9517954B2 Chemical injection control method and chemical injection controller Chemistry; Metallurgy 0 Active
US10221851B2 Transverse internal gear pump Mechanical Engineering; Lighting; Heating 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.