Kei Hattori
17Patents
8h-index
48Co-inventors
72Inventor score
Filing activity: Jul 27, 1987 → Sep 16, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5411631A | Dry etching method | Chemistry; Metallurgy | 46 | Expired |
| US5221450A | Electrostatic chucking method | Electricity | 33 | Expired |
| US5161201A | Method of and apparatus for measuring pattern profile | Physics | 30 | Expired |
| US5851641A | Electrostatic chucking device | Emerging Cross-Sectional Technologies | 20 | Expired |
| US5645921A | Electrostatic chucking device | Emerging Cross-Sectional Technologies | 15 | Expired |
| US6274507A | Plasma processing apparatus and method | Emerging Cross-Sectional Technologies | 13 | Expired |
| US4785714A | Positive-displacement fluid motor having self-stopping function, and method and control circuit for stopping the motor | Mechanical Engineering; Lighting; Heating | 12 | Expired |
| US5846886A | Metal film etching method | Electricity | 10 | Expired |
| US9922991B2 | Semiconductor memory device and method for manufacturing same | Electricity | 6 | Active |
| US9458885B2 | Sliding bearing and image forming apparatus | Physics | 5 | Active |
| US9810215B2 | Internal gear pump | Mechanical Engineering; Lighting; Heating | 3 | Active |
| US8021565B2 | Surface treatment method, etching method, and method for manufacturing electronic device | Emerging Cross-Sectional Technologies | 1 | Active |
| US11007572B2 | Sliding member and method for producing same | Performing Operations; Transporting | 0 | Active |
| US9269540B2 | Ion implantation apparatus and method of determining state of ion implantation apparatus | Electricity | 0 | Active |
| US10355364B2 | Waveguide slot antenna and method for producing same | Electricity | 0 | Active |
| US9517954B2 | Chemical injection control method and chemical injection controller | Chemistry; Metallurgy | 0 | Active |
| US10221851B2 | Transverse internal gear pump | Mechanical Engineering; Lighting; Heating | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.